Automation and information-measuring equipment
Modeling of nanofilms formation dynamics
Keywords
nanomaterials
cvd-approach
molecular dynamic
gas phase diffusion
Abstract
Modeling of nanomaterials deposition process using CVD-technology applying non-linear molecular dynamic methods is performed; dependence of Fourier amplitude-frequency characteristic on initial value of atom motion velocity (temperature) and factor of gas phase diffusion is obtained.
How to Cite
[1]
“Modeling of nanofilms formation dynamics”, Вісник ВПІ, no. 3, pp. 13–16, Nov. 2010, Accessed: Oct. 03, 2026. Available: https://visnyk.vntu.edu.ua/index.php/visnyk/article/view/741
